The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-D6-1~11] 6.2 Carbon-based thin films

Mon. Mar 17, 2014 9:30 AM - 12:30 PM D6 (D209)

10:15 AM - 10:30 AM

[17a-D6-4] Quantification of hydrogen in DLC with glow discharge optical emission spectroscopy

○Hikari Takahara1,2, Ryoya Ishigami3, Kenji Kodama1, Atsushi Kojyo1, Keisuke Yasuda3, Tatsuya Nakamura2, Yoshihiro Oka2 (Rigaku. Corp.1, University of Hyogo2, WERC3)

Keywords:DLC,水素分析,GD-OES