[17a-PG3-1~15] 15.6 IV-group-based compounds

△ [17a-PG3-3] Elucidation of the initial oxidation process of 4H-SiC by AR-XPS study

^○Tomoya Sasago¹, Hiroshi Nohira¹ (Tokyo City University¹)

Keywords:SiC,初期酸化