9:30 AM - 11:30 AM
[17a-PG3-4] Impact of sacrificial oxidation to reliability of gate oxide on step bunching
Keywords:ゲート酸化膜,信頼性,犠牲酸化
Presentation information
Poster presentation
15. Crystal Engineering » 15.6 IV-group-based compounds
[17a-PG3-1~15] 15.6 IV-group-based compounds
Mon. Mar 17, 2014 9:30 AM - 11:30 AM PG3 (G棟2階)