[17a-PG3-1~15] 15.6 IV-group-based compounds

[17a-PG3-5] Stabilization of SiO₂/SiC(0001) interface by NF₃ added Oxidation

^○（M1）Masahito Nagoshi¹, Ryu Hasunuma¹, Kikuo Yamabe¹ (University of Tsukuba¹)

Keywords:炭化ケイ素,二酸化ケイ素