[17p-D6-1~11] 6.2 Carbon-based thin films

[17p-D6-2] Effects of heat treatment on iodine incorporated amorphous carbon films

^○Setsuo Nakao¹, Takashi Matsufuji², Naoki Kishi², Tetsuo Soga², Akihiro Matsumoto¹ (AIST¹, NIT²)

Keywords:カーボン膜,非晶質,熱処理