[17p-D6-1~11] 6.2 Carbon-based thin films

△ [17p-D6-4] Influence of thermal history on the electrical conductivity of amorphous carbon nitride films

^○Naoyuki Tamura¹, Masami Aono¹, Tomo Harata¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (NDA¹)

Keywords:アモルファス,窒化炭素,電気特性