[17p-D6-1~11] 6.2 Carbon-based thin films

△ [17p-D6-5] Dependence of photo-response of a-CN_x films on deposition temperature

^○Tomo Harata¹, Masami Aono¹, Naoyuki Tamura¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (NDA¹)

Keywords:アモルファス,窒化炭素,光応答