The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D6-1~11] 6.2 Carbon-based thin films

Mon. Mar 17, 2014 2:00 PM - 5:15 PM D6 (D209)

3:15 PM - 3:30 PM

[17p-D6-6] Double-layer a-CNx:H Film Deposition for Field Emission Using Supermagnetron Plasma

○Haruhisa Kinoshita1, Ryouhei Taguchi1 (Shizuoka Univ., Grad. Sch. Eng.1)

Keywords:スーパーマグネトロンプラズマ