The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D6-1~11] 6.2 Carbon-based thin films

Mon. Mar 17, 2014 2:00 PM - 5:15 PM D6 (D209)

3:45 PM - 4:15 PM

[17p-D6-7] [INVITED]”Spectroscopy and Thin Films” - Toward the Design of Carbon-related Films Based on the Plasma Spectroscopy

○Haruhiko Ito1 (Nagaoka Univ. of Tech.1)

Keywords:アモルファス炭素啓薄膜,プラズマ分光