The 61st JSAP Spring Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[17p-E5-1~13] 15.6 IV-group-based compounds

Mon. Mar 17, 2014 1:15 PM - 4:45 PM E5 (E105)

2:00 PM - 2:15 PM

[17p-E5-4] Measurement of electrical properties for SiC film using THz ellipsometry

○Takashi Fujii1, Toshiyuki Iwamoto1, Yukinori Sato1, Takeshi Nagashima2 (Nippo Precision Co., Ltd.1, Osaka Univ.2)

Keywords:SiC,テラヘルツエリプソメトリー,電気特性