Low-temperature fabrication of InGaZnO TFT using facing target sputtering

Presentation information

Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

^○Hokuto Seo¹, Toshikatsu Sakai¹, Satoshi Aihara¹, Hiroshi Ohtake¹, Misao Kubota¹, Mamoru Furuta² (NHK STRL¹, Kochi Uni. of Tech.²)

Keywords:薄膜トランジスタ,酸化物半導体