[17p-PG3-1~30] Nanocarbon Technology

[17p-PG3-28] Drain-current DLTS study of ZnO TFT (3)

^○Msato Kubota¹, Takashi Wakabayashi¹, Yoshinori Oyaizu¹, Takahiro Mori¹, Tsutomu Muranaka¹, Yoichi Nabetani¹, Takashi Matsumoto¹ (Univ. of Yamanashi¹)

Keywords:酸化亜鉛,薄膜トランジスタ,電流DLTS