The 61st JSAP Spring Meeting, 2014

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Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-PG3-1~30] Nanocarbon Technology

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG3-5] Formation of β-Ga2O3 films by atmospheric pressure plasma enhanced CVD

○（B）Takuya Kiguchi1, Yukinori Nose1, Tsuyoshi Uehara2, Norifumi Fujimura1 (Osaka Prefecture Univ.1, SEKISUI CHEMICAL CO., LTD.2)

Keywords:酸化ガリウム,化学気相成長,大気圧プラズマ