[18a-D8-1~12] 13.2 Insulator technology

△ [18a-D8-1] Control of dielectric constant of Diamond-Like Carbon Films grown by Photoemission-Assisted Plasma-Enhanced CVD: From Low-k to High-k

^○（M1）Hiroyuki Hayashi¹, Susumu Takabayashi², Meng Yang¹, Shuichi Ogawa¹, Taiichi Otsuji², Yuji Takakuwa¹ (IMRAM, Tohoku Univ.¹, RIEC, Tohoku Univ.²)

Keywords:光電子制御プラズマ,DLC,誘電率