[18a-D8-1~12] 13.2 Insulator technology

△ [18a-D8-2] Evaluation of short range order in SiO2 thin-film by grazing-incidence wide and small-angle X-ray scattering

^○Kohki Nagata^1,4, Hiroki Tokutake¹, Masaya Nagasaka¹, Atsushi Ogura¹, Ichiro Hirosawa², Tomoyuki Suwa³, Akinobu Teramoto³, Takeo Hattori³, Tadahiro Ohmi³ (Meiji Univ.¹, JASRI², Tohoku Univ.³, JSPS Research fellow⁴)

Keywords:二酸化シリコン,シンクロトロン放射光,動径分布関数