The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-E13-1~11] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 9:00 AM - 12:00 PM E13 (E301)

10:45 AM - 11:00 AM

△ [18a-E13-7] Orientation improvement of the sputtered AlN on Si by the Ti pre-orientation layer

○（DC）Tadashi Mitsunari1, Yoshio Honda1, Hiroshi Amano1,2 (Nagoya Univ.1, Akasaki Research Center2)

Keywords:スパッタ,Si(110),Si(001)