The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-E13-1~11] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 9:00 AM - 12:00 PM E13 (E301)

10:30 AM - 10:45 AM

△ [18a-E13-6] Investigation of high-temperature sputtered-AlN buffer layer

○（M1）Hiroaki Ito1, Daisuke Iida1, Yasunari Kondo1, Mihoko Sowa1, Motoaki Iwaya1, Tetsuya Takeuchi1, satoshi Kamiyama1, Isamu Akasaki1,2 (Meijo Univ.1, Akasaki Inst.2)

Keywords:AlNバッファ層