Circuit integration on crystalline orientated gamma-Al<sub>2</sub>O<sub>3</sub>/Si(001) substrate and its characterization

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E14 (E302)

9:15 AM - 9:30 AM

^○Koji Oishi¹, Daisuke Akai², Makoto Ishida^1,2 (Toyohashi Tech.¹, EIIRIS²)

Keywords:Al2O3,結晶配向,インテグレーション