[18a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

▼ [18a-E14-4] Silicon micromechanical resonator with high quality factor fabricated by damage-free neutral beam etching process

^○Halubai Sekhar¹, Tomohiro Kubota¹, Van Toan Nguyen², Takahito Ono², Seiji Samukawa^1,3 (IFS, Tohoku Univ.¹, Graduate School of Engineering, Tohoku Univ.², WPI-AIMR, Tohoku Univ.³)

Keywords:中性粒子ビームエッチング,シリコンレゾネータ,エッチングダメージ