The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-D6-1~19] 6.2 Carbon-based thin films

Tue. Mar 18, 2014 1:30 PM - 6:45 PM D6 (D209)

3:45 PM - 4:00 PM

△ [18p-D6-9] Enhancement of dielectric strength of ALD-Al2O3 films using heavy-water oxidant

○Kazuhiro Kuruma1, Tatsuya Saito1, Akira Daicho1, Atsushi Hiraiwa1, Hiroshi Kawarada1 (Waseda Univ.1)

Keywords:原子層堆積,ダイヤモンド,重水