Robustness of Sn Precipitation at Ge<sub>1-x</sub>Sn<sub>x</sub> Surface on Ge(001) during Thermal Oxidation

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

Tue. Mar 18, 2014 1:30 PM - 5:30 PM D8 (D215)

4:00 PM - 4:15 PM

^○Kimihiko Kato¹, Takanori Asano¹, Noriyuki Taoka¹, Mitsuo Sakashita¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Nagoya Univ.¹)

Keywords:ゲルマニウムスズ,スズ析出,熱安定性