[18p-D8-1~15] 13.2 Insulator technology

△ [18p-D8-9] Theoretical study for adsorption of tri-methyl aluminum molecule on GaN (0001) surface

^○Shunsuke Chikada¹, Masakazu Takao¹, Atsushi Honda¹, Shin'ichi Higai¹, Kousuke Shiratsuyu¹, Takashi Fujii¹ (Murata Manufacturing¹)

Keywords:トリメチルアルミニウム,分子吸着,第一原理計算