The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[18p-D8-1~15] 13.2 Insulator technology

Tue. Mar 18, 2014 1:30 PM - 5:30 PM D8 (D215)

2:30 PM - 2:45 PM

[18p-D8-5] Fabrication and Evaluation of GeO2/Ge structure Using Kr/O2 Plasma Oxidation

○Yuya Nakatani1, Marina Yamaguchi1, Yoshitaka Iwasaki1, Tomo Ueno1 (Tokyo Univ. of Agri & Tech1)

Keywords:半導体,Ge