Hydrogen diffusion and defects passivation in a-IGZO TFT during etch-stopper layer deposition

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

4:45 PM - 5:00 PM

^○Tatsuya Toda¹, Dapeng Wang¹, Jingxin Jiang¹, Phi Hung Mai¹ (Kochi Univ. of Tech.¹)

Keywords:IGZO,TFT