The 61st JSAP Spring Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18p-E10-1~20] Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

5:15 PM - 5:30 PM

[18p-E10-16] IGZO film Characteristic uniformity and TFT reliability for Large Sputtering Cathode

○Motoshi Kobayashi1, Taihei Mizuno1, Yuusuke Ootani1, Masaki Takei1, Yuusuke Mizuno1, Yasuo Ookubo1, Tetsu Ishibashi1, Tatsunori Isobe1, Makoto Arai1, Junya Kiyota1, Kazuya Saito1 (ULVAC1)

Keywords:IGZO,酸化物半導体