Evaluation of the oxide semiconductor thin films due to the difference in the sputtering environment

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

2:00 PM - 2:15 PM

^○Yasuyuki Takanashi¹, Hiroaki Tao¹, Mototaka Ochi¹, Hiroshi Goto¹, Toshihiro Kugimiya¹ (Kobe Steel, Ltd.¹)

Keywords:IGZO,μ-PCD,TFT