3:45 PM - 4:00 PM
△ [18p-E14-11] Pattern Size Dependence of Anisotropic Biaxial Stresses in Strained Si Using Surface Enhanced Raman Scattering
Keywords:ラマン分光法,歪Si,表面プラズモン共鳴
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration
Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)