The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

4:15 PM - 4:30 PM

△ [18p-E14-12] Reduction of SiO2 mixed with sugar by H-radical generated from thermal plasma

○（B）Yuji Okamoto1,2, Yoshikazu Suzuki2, Hideomi Koinuma3, Masatomo Sumiya1 (NIMS1, Tsukuba Uni2, GSFS3)

Keywords:水素ラジカル,砂糖