The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

4:30 PM - 4:45 PM

△ [18p-E14-13] Raman analysis of the surface strain in transistor channels using localized plasmon resonance

○Takahiro Kijima1, Daisuke Kosemura1, Siti Norhidayah Mohd Yusoff1, Shoutarou Yamamoto1, Ryosuke Imai1, Atsushi Ogura1 (Meiji Univ.1)

Keywords:Raman,transistor channels,SERS