1:45 PM - 2:00 PM
[18p-E5-3] Effect of thermal process on the interface of n-Si/n-4H-SiC heterojunctions
Keywords:表面活性化ボンディング
Oral presentation
15. Crystal Engineering » 15.6 IV-group-based compounds
Tue. Mar 18, 2014 1:15 PM - 4:15 PM E5 (E105)
1:45 PM - 2:00 PM
Keywords:表面活性化ボンディング