The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 9:00 AM - 11:45 AM E14 (E302)

9:45 AM - 10:00 AM

△ [19a-E14-4] Fabrication of high mobility poly-Si TFT using Blue-Multi-Laser-Diode Annealing

Ｋｏｕｙａ Ｓｕｇｉｈａｒａ1, Ｋｉｙｏｈａｒｕ Ｓｈｉｍｏｄａ1, Ｔａｔｓｕｙａ Ｏｋａｄａ1, ○Ｔａｋａｓｈｉ Ｎｏｇｕｃｈｉ1, Ｔａｋａｈｉｒｏ Ｍｉｙａｓｈｉｔａ2, Ｙｕｔａｋａ Ｋｕｓｕｄａ2, Ｓｈｉｎｉｃｈｉ Ｍｏｔｏｙａｍａ2 (Univ. of the Ryukyus1, SAMCO Inc.2)

Keywords:TFT,Poly Si,BLDA