[19a-F6-1~6] 8.4 Plasma etching

[19a-F6-5] Study on plasma emission lights-surface interactions

^○Yan Zhang¹, Kenji Ishikawa¹, Makoto Sekine¹, Masanaga Fukasawa², Kazunori Nagahata², Shigetaka Tomiya², Tetsuya Tatsumi², Keigo Takeda², Hiroki Kondo¹, Masaru Hori¹ (Nagoya Univ.¹, Sony²)

Keywords:エッチング,フォトンフラックス