[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

[19a-PA4-4] Polycrystallization of a-TiO2 Thin Films and Improvement of Electric Conductivity of The Films by Microwave Hydrogen Plasma Treatment

^○（M2）ＥＮ Ｔｏｕ¹, Tetsuya Sato¹, Tetsuji Arai¹, Kiyokazu Nakagawa¹ (Univ. of Yamanashi¹)

Keywords:酸化チタン,マイクロ波,結晶化