[19p-D9-1~18] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

△ [19p-D9-2] First-principles analysis on stability of contamination metal atoms in β-Si3N4 surface

^○（M2）Syunsuke Kobayashi¹, Daiki Shibata¹, Koji Sueoka¹, Jun Komachi², Koichiro Saga² (Okayama Pref. Univ.¹, SONY Corp.²)

Keywords:β-Si3N4表面,第一原理解析,SiN窒化膜表面