[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-10] Formation of slip dislocation by rapid heating in minimal heating equipment

^○Haruki Toonoe¹, Takashi Yajima¹, Yuuki Ishida^1,2, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (MIMINAL¹, AIST²)

Keywords:スリップ転位