[19p-F6-1~18] 8.4 Plasma etching

△ [19p-F6-6] Instantaneous generation of many flaked particles in mass-production plasma etching equipment

^○Yuji Kasashima¹, Taisei Motomura¹, Natsuko Nabeoka¹, Fumihiko Uesugi¹ (AIST¹)

Keywords:剥離パーティクル,電場応力,撃力