The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[19p-F6-1~18] 8.4 Plasma etching

Wed. Mar 19, 2014 2:00 PM - 7:00 PM F6 (F306)

3:45 PM - 4:00 PM

[19p-F6-7] Mechanism of plasma etching on gallium nitride at high temperature (4)

○(M2)Zecheng Liu1, Takashi Kako1, Kenji Ishikawa1, Osamu Oda1, Keigo Takeda1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1)

Keywords:エッチング,チッカガリウム