[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-10] Proximity Gettering of Carbon Cluster Ion Irradiated Silicon Wafers (1) - Gettering Effects on Transition Metal Impurities -

^○Kazunari Kurita¹, Takeshi Kadono¹, Ryousuke Okuyama¹, Takurou Iwanaga¹, Yoshihiro Koga¹, Hidehiko Okuda¹ (SUMCO CORPORATION¹)

Keywords:Gettering,Metal impurity,Carbon cluster ion beam