[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

△ [19p-F9-11] Carbon Cluster Ion Irradiated Silicon Wafers(2) -Effects of Amount and Size of Carbon Cluster on Defects Formation-

^○Ryosuke Okuyama¹, Takeshi Kadono¹, Takuro Iwanaga¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (SUMCO Corporation¹)

Keywords:クラスターイオン,シリコン