[19p-PG2-1~12] 13.2 Insulator technology

[19p-PG2-1] Passivation of Silicon Surfaces by Oxygen Plasma Treatments

^○（M2）Tomohito Node¹, Shinya Yoshidomi¹, Jun Furukawa¹, Hiroshi Abe¹, Masahiko Hasumi¹, Toshiyuki Sameshima¹ (Tokyo Univ. of Agriculture and Technology¹)

Keywords:パッシベーション