[19p-PG2-1~12] 13.2 Insulator technology

[19p-PG2-8] Fabrication and Evaluation of Germanium Oxide Film made by a CVD process

^○（M1）Yuto Matsuoka¹, Yoshitaka Iwasaki¹, Tomo Ueno¹ (Tokyo Univ. of Agri. & Tech¹)

Keywords:半導体,ゲルマニウム,酸化膜