[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-11] Low-Temperature CLC Poly-Si TFTs with Sputtered Al₂O₃ Gate Dielectric Layer

^○Tatsuya Meguro¹, Daiki Chida¹, Akito Hara¹ (Tohoku Gakuin Univ.¹)

Keywords:TFT