[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

△ [19p-PG3-8] PZT thin film deposition on inclined plane and structure fabricaton

^○Shingo Moriue¹, Junichi Inoue¹, Syogo Kajimura¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (Univ.of Hyogo¹)

Keywords:PZT,MEMS