[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

△ [19p-PG3-9] Parallel-connected Spiral Actuator with PZT thin film

^○Ryo Sano¹, Junichi Inoue¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (University of Hyogo¹)

Keywords:PZT