[20a-F10-1~13] 13.5 Si-English Session

▼ [20a-F10-5] Electrical activation and crystallinity recovery of P-implanted Ge

^○中村俊允^1,2，西村知紀^1,2，長汐晃輔^1,2，鳥海明^1,2 (東大工¹，ＪＳＴ－ＣＲＥＳＴ²)

キーワード：ゲルマニウム,implantation,phosphorus