1:45 PM - 2:00 PM
[13p-1E-3] Approach of evaluation method for low carbon concentration in silicon crystal
Keywords:carbon,FTIR,photoluminescence
Oral presentation
15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
Sun. Sep 13, 2015 1:15 PM - 6:00 PM 1E (143)
座長:小野 敏昭(SUMCO),関口 隆史(NIMS)
1:45 PM - 2:00 PM
Keywords:carbon,FTIR,photoluminescence