The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[13p-1E-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Sun. Sep 13, 2015 1:15 PM - 6:00 PM 1E (143)

座長:小野 敏昭(SUMCO),関口 隆史(NIMS)

1:45 PM - 2:00 PM

[13p-1E-3] Approach of evaluation method for low carbon concentration in silicon crystal

〇Satoko Nakagawa1, Mitsuo Higasa1, Kazuhiko Kashima1 (1.GlobalWafers Japan)

Keywords:carbon,FTIR,photoluminescence