[13p-1E-1~17] 15.8 Crystal evaluation, impurities and crystal defects

[13p-1E-4] Effect of Low Carbon Concentration on Bulk Carrier Lifetime in MCZ Silicon Crystal (3)

〇Mitsuo Higasa¹, Satoko Nakagawa¹, Kazuhiko Kashima¹, Yuta Nagai¹ (1.GlobalWafers Japan)

Keywords:Silicon Crystal,Lifetime,Carbon