[15a-4E-1~7] 7.1 X-ray technologies

[15a-4E-5] The New X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 2)

〇Hiroyoshi Soejima¹, Toshiyuki Kakihara², Toshiharu Ai², Kuniyoshi Mori², Hiroyuki Watanabe² (1.Applied Science Lab., 2.Hamamatsu Photonics)

Keywords:X-ray detector,Two-dimensional detector

It developed a nano variable slit. The 5 nm step.is variable with the 2 nm precision. Using this slit, it verified at the slit size of the micron - the nano area.