The 76th JSAP Autumn Meeting, 2015

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Joint Session K » 21.1 Joint Session K

[15p-1B-1~18] 21.1 Joint Session K

Tue. Sep 15, 2015 1:15 PM - 6:00 PM 1B (133+134)

座長:浦岡 行治(奈良先端大),神谷 利夫(東工大)

2:45 PM - 3:00 PM

△ [15p-1B-7] Relationship between excess oxygen and instability in amorphous In-Ga-Zn-O

〇Keisuke Ide1, Hidenori Hiramatsu1, Hideya Kumomi2, Hideo Hosono1,2, Toshio Kamiya1,2 (1.MSL, Tkyo Tech., 2.MCES, Tokyo Tech.)

Keywords:Thin Film Transistor,Oxide Semiconductor,Amorphous