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[15p-PA4-3] Simulation of Self-bias Channel Diode having Super Junction structure
Keywords:Power Semiconductor Device,Self-bias Channel Diode,Super Junction
The authors have proposed a low on-state voltage of the self-bias channel diode (later SBCD) with a DMOS cell structure obtained by introducing a self-bias effect to the channel diode of 3-terminal operation. This device is a trade-off related to the on-voltage and the breakdown voltage. In this paper, employing a super junction structure on the SBCD, without adversely affecting the turn-on voltage, and report the confirmed that high breakdown voltage is possible.